Copper on sapphire: Stability of thin films at 0.7 Tm

C.M. Kennefick, R. Raj
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引用次数: 76

Abstract

Thin films of copper deposited on the (1120) plane of sapphire disintegrated into clusters when annealed at 650°C under nonoxidizing conditions. The breakdown was found to initiate at processing defects in the film; this is in contrast to earlier work with zirconia films on sapphire where cavities nucleated profusely at grain boundaries due to poor wetting between zirconia and alumina. A comparison between these two cases, as well as a theoretical model, suggest that processing defects are the source of instability when the contact angle is less than (α + π/2), where α is one half of the dihedral angle formed by a grain boundary with the free surface. The breakdown of the film eventually led to separated, single crystal beads of copper. The beads coarsened and changed their orientation by solid state diffusion, leading to a highly preferred orientation. The {l11} plane of copper was found to be parallel to the sapphire surface. But the texture was planar isotropic, that is, it was rotationally symmetric around the plane normal. This result is in agreement with other observations that copper forms {111} planar isotropic texture on (0001) sapphire, and also on polycrystalline α-alumina.

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蓝宝石上的铜:0.7 Tm下薄膜的稳定性
在650℃非氧化条件下,沉积在蓝宝石(1120)平面上的铜薄膜分解成簇状。发现击穿是由薄膜的加工缺陷引起的;这与蓝宝石上的氧化锆薄膜的早期研究相反,由于氧化锆和氧化铝之间的润湿性差,在晶界处有大量的空腔成核。两种情况的比较以及理论模型表明,当接触角小于(α + π/2)时,加工缺陷是不稳定的来源,其中α为晶界与自由表面形成的二面角的一半。薄膜的破裂最终导致了分离的单晶铜珠。通过固体扩散,微珠变粗并改变了取向,形成了高度优选的取向。铜的平面被发现与蓝宝石表面平行。但是纹理是平面各向同性的,也就是说,它是围绕平面法线旋转对称的。这一结果与其他观察结果一致,即铜在(0001)蓝宝石和多晶α-氧化铝上形成{111}平面各向同性织构。
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