{"title":"Sputter hot filament hollow cathode ion source and its application to ultra-low energy ion implantation in 2D materials","authors":"Felix Junge, M. Auge, H. Hofsäss","doi":"10.1016/j.nimb.2021.10.017","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":19302,"journal":{"name":"Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms","volume":"434 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/j.nimb.2021.10.017","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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