Crystal Growth of Cr2O3 Thin Films on YAlO3(001) Substrate

Abstract

The Cr 2 O 3 thin films are fabricated on YAlO 3 (YAO)(0 0 1) substrates etched with 5M and 12M NaOH solutions. After the etching with 12M NaOH solution, the YAO surface showed step-terraces structure with the step height of one unit. The surface morphology of Cr 2 O 3 thin films grown on 5M, 12M etched YAO and r -cut sapphire substrate is almost similar even though the crystal structure of YAO is orthorhombic. Focusing on one grain of Cr 2 O 3 thin film, the surface is two dimensionally flat with approximately unit step of 0.36nm. The Cr 2 O 3 films expitaxially grow with the relationship of Cr 2 O 3 ±[1 1 0] // YAO[1 0 0], Cr 2 O 3 ±[ 0], double-sign corresponds, and Cr 2 O 3 (1 2) // YAO(0 0 1).