High quality three-dimensional aluminum microwave cavities

M. Kudra, J. Biznárová, F. Roudsari, Jonathan Burnett, D. Niepce, Simone Gasparinetti, Björn Wickman, P. Delsing
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引用次数: 27

Abstract

We present a comprehensive study of internal quality factors in superconducting stub-geometry 3-dimensional cavities made of aluminum. We use wet etching, annealing and electrochemichal polishing to improve the as machined quality factor. We find that the dominant loss channel is split between two-level system loss and an unknown source with 60:40 proportion. A total of 17 cavities of different purity, resonance frequency and size were studied. Our treatment results in reproducible cavities, with ten of them showing internal quality factors above 80 million at a power corresponding to an average of a single photon in the cavity. The best cavity has an internal quality factor of 115 million at single photon level.
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高品质的三维铝微波腔
我们提出了一个全面的研究内部质量因素的超导根几何三维空腔由铝制成。我们采用湿法蚀刻、退火和电化学抛光等方法来提高加工质量系数。我们发现占主导地位的损失通道被两级系统损失和未知源以60:40的比例分割。共研究了17个不同纯度、共振频率和尺寸的空腔。我们的处理产生了可复制的腔,其中10个腔的内部质量因子超过8000万,对应于腔中单个光子的平均功率。在单光子水平上,最佳腔体的内部质量因子为1.15亿。
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