Basic characteristics of quartz crystal sensor with interdigitated electrodes

Abstract

This paper describes basic characteristics of the quartz crystal sensor with interdigitated electrodes (IDE quartz crystal sensor) which is for simultaneous monitoring of mass, viscosity, conductivity and dielectric changes of liquids or thin films. As the IDE quartz crystal sensor has three terminals for a pair of IDEs on the one side and a counter electrode on the other side, the resonance properties have been analyzed using the electrical equivalent circuit models and measured experimentally for all connecting types of electrode pairs. The IDE quartz crystal has shown clear resonance curves for calculating the resonance frequency and resonance resistance values as well as normal quartz crystal in the air and in contact with liquid. Small shifts in the resonance frequency and resonance resistance depending on the connecting types have been obtained and analyzed using the equivalent circuit models. We have found the integrated quartz crystal and IDE sensors could be monitored simultaneously by only one impedance analyzer. Finally, two types of measuring systems have been demonstrated for continuous measuring methods.