Manufacturing model generation based on process constraint for micro device

Abstract

The feature modelling technology makes micro device design in a more convenient way. This paper concentrates on how to revise the original feature model and construct manufacturing model through process constraint method. By generating reference manufacturing model, the design features are mapping to manufacturing features organized with layer information. After constraint features mapping procedure, the relationship between design features and constraint features are built. Then, enforcing the constraint rules, the primary manufacturing model is reconstructed by model revising method.