Methods for plasma density estimations in large-volume hollow anode

Abstract

The results of investigation of low-pressure glow discharge with the hollow cathode and large-volume hollow anode in argon and nitrogen are presented. Data on plasma density and electron temperature are obtained. Model, which describes the mechanisms of plasma sustaining in hollow anode, is proposed. Model takes into account non-uniformity of plasma density distribution in the anode cavity. The estimations of the plasma parameters were done. Model agrees well with the experimental data.