HNF - Helmholtz Nano Facility

Abstract

The Helmholtz Nano Facility (HNF) is a state-of-the-art cleanroom facility. The cleanroom has ~1100 m 2 with cleanroom classes of DIN ISO 1-3. HNF operates according to VDI DIN 2083, Good Manufacturing Practice (GMP) and aquivalent to Semiconductor Industry Association (SIA) standards. HNF is a user facility of Forschungszentrum Julich and comprises a network of facilities, processes and systems for research, production and characterization of micro- and nanostructures. HNF meets the basic supply of micro- and nanostructures for nanoelectronics, fluidics. micromechanics, biology, neutron and energy science, etc.. The task of HNF is rapid progress in nanostructures and their technology, offering efficient access to infrastructure and equipment. HNF gives access to expertise and provides resources in production, synthesis, characterization and integration of structures, devices and circuits. HNF covers the range from basic research to application oriented research facilitating a broad variety of different materials and different sample sizes.