An Analysis of the Quality Attributes of Semiconductor Deposition Equipment Using Kano Model: Implications from the Perspective of Complex Products and Systems (CoPS)

Abstract

Semiconductor deposition equipment is an important example of Complex Products and Systems (CoPS) and requires in-depth understanding of user requirements. For this reason, we analyzed and compared users' and producers' perspectives on the quality attributes of semiconductor deposition equipment using the Kano model. The results show that the patterns of users' perspectives were different from those of producers. Out of 22 level-2 quality attributes, producers evaluated all 22 attributes as attractive qualities, but users evaluated only 6 as "attractive," 10 as "indifferent," 2 as "must have," and 4 as "other." Although all quality attributes were attractive for producers, only those related to reliability were attractive or must-have qualities, and all others were "indifferent." This result implies that the perspectives on quality attributes may be different between users and producers, and producers should revise their perspectives and strategies. In addition, the results support the characteristics of CoPS suggested by literature implying that performance is more important than economies of scale and cost reduction. It is suggested that producers of semiconductor deposition equipment strategize their approaches to users by considering the characteristics of CoPS.