F. Henry, B. Armas, C. Combescure, D. Thenegal, R. Flamand
{"title":"Chemical Vapour Deposition of AIN-Si3N4 Codeposits","authors":"F. Henry, B. Armas, C. Combescure, D. Thenegal, R. Flamand","doi":"10.1051/JPHYSCOL:1995593","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":17944,"journal":{"name":"Le Journal De Physique Colloques","volume":"27 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"1995-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Le Journal De Physique Colloques","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1051/JPHYSCOL:1995593","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}