{"title":"Evaluation of lattice displacement and electrical property of Zn-ion implanted GaN by Rutherford backscattering spectrometry","authors":"K. Kubota, T. Nishimura, K. Kuriyama, T. Nakamura","doi":"10.1016/J.NIMB.2019.05.017","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":19302,"journal":{"name":"Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms","volume":"97 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2019-07-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/J.NIMB.2019.05.017","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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