F. Fau-Canillac, F. Carrere, A. Reynes, C. Vahlas, F. Maury
{"title":"Mass Spectrometric Study of the Gas Phase During Chemical Vapor Deposition of Pyrolytic Carbon","authors":"F. Fau-Canillac, F. Carrere, A. Reynes, C. Vahlas, F. Maury","doi":"10.1051/JPHYSCOL:1995508","DOIUrl":null,"url":null,"abstract":"The pyrolysis of CH 4 , of C 3 H 8 and of the mixture 20C 3 H 8 /80CH 4 was investigated in a hot wall CVD reactor by mass spectrometry. Experiments were conducted as a function of temperature and of surface-to-volume (S/V) ratio of the substrate. The main by-products of the pyrolysis were identified and reaction mechanisms were proposed taking into account homogenous decomposition/formation reactions. Cyclic species are possibly involved in the formation mechanism of pyrocarbon.","PeriodicalId":17944,"journal":{"name":"Le Journal De Physique Colloques","volume":"27 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"1995-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Le Journal De Physique Colloques","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1051/JPHYSCOL:1995508","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
The pyrolysis of CH 4 , of C 3 H 8 and of the mixture 20C 3 H 8 /80CH 4 was investigated in a hot wall CVD reactor by mass spectrometry. Experiments were conducted as a function of temperature and of surface-to-volume (S/V) ratio of the substrate. The main by-products of the pyrolysis were identified and reaction mechanisms were proposed taking into account homogenous decomposition/formation reactions. Cyclic species are possibly involved in the formation mechanism of pyrocarbon.
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