Влияние обработки в парах серы на скорость термооксидирования InP, состав, морфологию поверхности и свойства плёнок

Abstract

Предложена методика модифицирования InP в парах серы, методом локального рентгеноспектрального микроанализа подтверждено её наличие на поверхности. Дляплёнок нанометрового диапазона толщины (до 50 нм), выращенных термическим оксидированием InP с предварительно обработанной в парах серы поверхностью, методом Оже-электронной спектроскопии установлено послойное распределение компонентов. По данным атомно-силовой микроскопии модифицирование InP серой приводит к формированию поверхности с зернистой структурой, более упорядоченной по сравнению с эталоном (собственное термооксидирование фосфида индия). Несмотря на то, что в результирующих плёнках сера не обнаружена, они обладают полупроводниковыми свойствами, тогда как для собственных оксидных слоёв на InP характерна омическая проводимость     REFERENCES Markov V. F., Mukhamedzyanov Kh. N., Maskaeva L. N. Materialy sovremennoj jelektroniki [Materials of modern electronics]. Ekaterinburg, Publishing Ural. un-one, 2014, 272 p. (in Russ.) 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