A new method for metrology monitor charts' spec limit setting

Abstract

In this paper, a new method to set the spec (specification) limits for measurement data from metrology tools is introduced. Combining the accuracy spec guaranteed by metrology vendors, the metrology tool's actual performance, and the inline measurement requirement according to MSA (Measurement System Analysis) spirit, we've not only studied the proper method but also standardized the control flow to define the spec limits. Through such categorization and characterization, we can identify different situations to set the proper spec limits. This method can be applied as one of the release criteria for new metrology tools at the certification stage, and be further applied as one of the routine review flow for tool performance checking.