E. Frolova, V. Khomych, R. M. Kravchuk, O. Kolomys, Yu. M. Gudenko, O. Pylypchuk, V. Styopkin, A. Dobrovolskiy
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Abstract
The results of the treatment of TiO2 film in volume discharge with an Ar/H2 mixture are presented. The treated film demonstrates the changes in transparency and conductivity. Raman spectra show no changes in the phase state of the film after plasma treatment.
期刊介绍：
The journal covers the following topics:
Physics of Radiation Effects and Radiation Materials Science;
Nuclear Physics Investigations;
Plasma Physics;
Vacuum, Pure Materials and Superconductors;
Plasma Electronics and New Methods of Acceleration.
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