High resolution electron microscopic studies of the oxidation process of ZnTe films

Chihiro Kaito, Nobuyuki Nakamura, Yoshio Saito
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引用次数: 3

Abstract

ZnTe films of about 15 nm thickness were prepared by vacuum deposition from ZnTe power onto NaCl substrates heated to 300°C. Zinc oxide particles with a size of 5 nm which were formed on the surface of ZnTe crystals showed no epitaxial relationship with the latter. Tellurium crystals appeared on certain parts of the ZnTe crystals with specific epitaxial relationships such as (0111)[1010]Te(111)[110]ZnTe and (0111)[1010]Te(0001)[1010]ZnTe. Oxidation of the (110) surfaces of ZnTe crystals are slower than for any other plane. Images of the (110) films at an initial stage of oxidation contained faint superlattice fringes of about 0.85 nm spacing. On the basis of the matching between the HREM images and computer simulation images, the origin of the fringes was attributed to a periodic array of Zn vacancies introduced by the diffusion of Zn atoms to the surface of the ZnTe crystal.

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ZnTe薄膜氧化过程的高分辨电镜研究
将ZnTe粉末真空沉积在加热至300℃的NaCl衬底上,制备了厚度约为15 nm的ZnTe薄膜。在ZnTe晶体表面形成5nm大小的氧化锌颗粒,与ZnTe晶体无外延关系。碲晶体以特定的外延关系出现在ZnTe晶体的某些部分,如(0111)[1010]Te(111)[110]ZnTe和(0111)[1010]Te(0001)[1010]ZnTe。ZnTe晶体(110)表面的氧化比其他任何平面都要慢。氧化初期(110)薄膜的图像包含约0.85 nm间距的微弱超晶格条纹。根据HREM图像与计算机模拟图像的匹配,条纹的起源归因于锌原子扩散到ZnTe晶体表面所引入的锌空位的周期性阵列。
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