Substrate Temperature Effect on the Optical Properties of ZrO2 Films Prepared by Thermal Evaporation

Abstract

The pure substance of Zirconium oxide  (ZrO2) was deposited on substrate of glass with various substrate temperatures using thermal evaporation under the pressure of (2×10-5 bar) and with a deposition rate of (0.5 nm/S) with an average thickness of (300 nm). The optical properties of these prepared films were concentrated as a function of the substrate temperature. It was found that the values ​​of each of the refractive index, packing density, together with the extinction coefficient increased with the increase in the substrate temperature of the prepared films.