Application of metallization patterns to glass

E.W.A. Young, A.R. de Wit, A.A.M. van Weert, E. van der Voort, S.M.R. Gelderland, L.G.J. Fokkink, M.H. Blees, A.R. Balkenende
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引用次数: 1

Abstract

Metallization patterns are applied to the selection plates of the Zeus panel to be able to direct the electrons through the substructure to the proper colour pixel at the phosphor screen. The patterns, which also partially cover the insides of the holes in the selection plates, are applied using a subtractive process with either vacuum-deposited aluminium or wet-chemically applied silver. Different options for the lithographic resist are discussed, i.e. a cataphoretic negative resist and a sprayed positive resist. Satisfactory results have been obtained with both options. Adhesion of the metal to glass has been accomplished by application of a chromium adhesion layer in the case of the vacuum-deposited metal and by mechanical anchoring in the case of the wet-chemically applied metallization.

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金属化图案在玻璃上的应用
金属化图案应用于Zeus面板的选择板,以便能够通过子结构将电子引导到荧光粉屏幕上的适当颜色像素。这些图案也部分覆盖在选择板上的孔的内部,使用真空沉积铝或湿化学镀银的减法工艺进行应用。讨论了光刻抗蚀剂的不同选择,即弹射负抗蚀剂和喷涂正抗蚀剂。两种方法均取得了满意的结果。在真空沉积金属的情况下,金属与玻璃的粘附是通过应用铬粘附层来完成的,在湿化学应用金属化的情况下,通过机械锚定来完成的。
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