Supervision and control of medical sterilization processes utilizing the Multipole Resonance Probe

2013 IEEE MTT-S International Microwave Workshop Series on RF and Wireless Technologies for Biomedical and Healthcare Applications (IMWS-BIO) Pub Date : 2013-12-01 DOI:10.1109/IMWS-BIO.2013.6756158

C. Schulz, T. Styrnoll, P. Awakowicz, I. Rolfes

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引用次数: 8

Abstract

An innovative and sensitive plasma probe suitable for the supervision and control of low-temperature plasma sterilization processes is presented in this contribution. For heat or chemical sensitive materials, plasmas are an indispensable tool regarding the sterilization of surgery instruments, for example. The presented Multipole Resonance Probe (MRP) allows for the simultaneous determination of plasma density, plasma temperature, and collision frequency by a simple and fast evaluation of its frequency response. Fed by an rf-signal, the MRP yields sensitive and local measurements for the determination of lowest fluctuations and for the application of a sensor network, respectively. With a minimal distance of 3 cm between two probes, the MRP can be deployed effectively as sensor network inside the plasma for the supervision of its stability and homogeneity. Based on 3D-electromagnetic field simulations the advantages of the MRP are discussed in detail. Compared to a Langmuir probe, measurements in a Double Inductive Coupled Plasma (DICP) show the suitability of the MRP inside an argon plasma.

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利用多极共振探针对医疗灭菌过程的监督和控制

一种创新和敏感的等离子体探针适用于低温等离子体灭菌过程的监督和控制。例如，对于热敏或化学敏感材料，等离子体是手术器械灭菌方面不可或缺的工具。本发明的多极共振探针(MRP)可以通过对其频率响应的简单快速评估，同时测定等离子体密度、等离子体温度和碰撞频率。MRP由射频信号馈送，分别为确定最低波动和传感器网络的应用提供敏感和局部测量。两个探针之间的最小距离为3厘米，MRP可以有效地部署为等离子体内部的传感器网络，以监督其稳定性和均匀性。在三维电磁场仿真的基础上，详细讨论了MRP的优点。与Langmuir探针相比，双电感耦合等离子体(DICP)中的测量结果表明，MRP在氩等离子体中的适用性。

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2013 IEEE MTT-S International Microwave Workshop Series on RF and Wireless Technologies for Biomedical and Healthcare Applications (IMWS-BIO)

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