Efficient analysis of periodic structures in microacoustic devices

B. Jakoby, M. Vellekoop
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引用次数: 2

Abstract

Periodic structures utilized as transducer or reflector elements play an important role in microacoustic wave devices. Such structures can be described using approximate analytical models. However, to obtain the accuracy required for reliable device simulation, numerical methods have to be employed. In this contribution we present an efficient numerical approach to calculate the dispersion curves associated with microacoustic modes propagating in periodic structures. The computational efficiency is related to the utilization of the Fast Fourier Transform (FFT) algorithm in a hybrid Method of Moments (MoM)/Mode Matching analysis. From the obtained dispersion curves characteristic parameters such as the stopband width can be obtained which can be used in a coupling-of-modes model of the structure.
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微声器件周期结构的有效分析
作为换能器或反射器元件的周期结构在微声波器件中起着重要的作用。这种结构可以用近似的解析模型来描述。然而,为了获得可靠的器件仿真所需的精度,必须采用数值方法。在这篇贡献中,我们提出了一种有效的数值方法来计算与周期性结构中传播的微声模式相关的色散曲线。计算效率与快速傅里叶变换(FFT)算法在矩量法/模式匹配混合分析中的应用有关。从得到的色散曲线中可以得到阻带宽度等特征参数,这些参数可以用于结构的模态耦合模型。
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