{"title":"FT-IR Studies Accompanying the Development of a Plasmaless Etching Process on the Basis of the Elemental Halogens Bromine and Fluorine","authors":"A. Guber, U. Köhler, W. Bier","doi":"10.1007/978-3-7091-6840-0_162","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":18642,"journal":{"name":"Mikrochemie vereinigt mit Mikrochimica acta","volume":"23 1","pages":"635-637"},"PeriodicalIF":0.0000,"publicationDate":"1997-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Mikrochemie vereinigt mit Mikrochimica acta","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/978-3-7091-6840-0_162","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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