{"title":"ドライプロセスによる炭素系硬質膜の合成ならびに機械的諸特性の解明","authors":"S. Takeuchi","doi":"10.4139/sfj.74.74","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":17564,"journal":{"name":"Journal of The Surface Finishing Society of Japan","volume":"11 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2023-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of The Surface Finishing Society of Japan","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.4139/sfj.74.74","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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