T. Yanagitani, K. Arakawa, K. Kano, Akihiko Teshigahara, M. Akiyama
{"title":"Giant shear mode electromechanical coupling coefficient k15 in c-axis tilted ScAlN films","authors":"T. Yanagitani, K. Arakawa, K. Kano, Akihiko Teshigahara, M. Akiyama","doi":"10.1109/ULTSYM.2010.5935791","DOIUrl":null,"url":null,"abstract":"Giant shear mode electromechanical coupling coeficient k<inf>15</inf>' of 0.32 (k<inf>15</inf><sup>2</sup>=10 %) were found in the c-axis 33° tilted ScAlN films. High k<inf>15</inf> values were observed even in the high temperature of 600 °C. TCF values were deteriorated in ScAlN film compared with non-doped AlN crystal. Shear mode ScAlN films should be a good candidate for liquid SH-SAW and FBAR sensors in the high temperature.","PeriodicalId":6437,"journal":{"name":"2010 IEEE International Ultrasonics Symposium","volume":"23 1","pages":"2095-2098"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"47","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 IEEE International Ultrasonics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.2010.5935791","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 47
Abstract
Giant shear mode electromechanical coupling coeficient k15' of 0.32 (k152=10 %) were found in the c-axis 33° tilted ScAlN films. High k15 values were observed even in the high temperature of 600 °C. TCF values were deteriorated in ScAlN film compared with non-doped AlN crystal. Shear mode ScAlN films should be a good candidate for liquid SH-SAW and FBAR sensors in the high temperature.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
