M. Renaud, T. Sterken, A. Schmitz, P. Fiorini, C. Hoof, R. Puers
{"title":"Piezoelectric Harvesters and MEMS Technology: Fabrication, Modeling and Measurements","authors":"M. Renaud, T. Sterken, A. Schmitz, P. Fiorini, C. Hoof, R. Puers","doi":"10.1109/SENSOR.2007.4300274","DOIUrl":null,"url":null,"abstract":"Piezoelectric converters designed for harvesting energy from mechanical vibrations have been fabricated by micromachining technologies. The manufactured piezoelectric energy harvesters have been characterized by applying a sinusoidal oscillation as mechanical input and by using a simple resistive load to measure the output power of the system. A maximum output power of 40 muW has been measured for an input vibration having a frequency of 1.8 kHz and an amplitude of 180 nm. A model aimed at estimating the output power of the fabricated piezoelectric structures has been developed and theoretical estimations have been compared with experimental results.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"18 10 1","pages":"891-894"},"PeriodicalIF":0.0000,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"73","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2007.4300274","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 73
Abstract
Piezoelectric converters designed for harvesting energy from mechanical vibrations have been fabricated by micromachining technologies. The manufactured piezoelectric energy harvesters have been characterized by applying a sinusoidal oscillation as mechanical input and by using a simple resistive load to measure the output power of the system. A maximum output power of 40 muW has been measured for an input vibration having a frequency of 1.8 kHz and an amplitude of 180 nm. A model aimed at estimating the output power of the fabricated piezoelectric structures has been developed and theoretical estimations have been compared with experimental results.
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