{"title":"Compressive imaging applied to infrared-based semiconductor failure analysis","authors":"Ting Sun, Gary Woods, K. Kelly","doi":"10.1109/IRMMW-THZ.2011.6105248","DOIUrl":null,"url":null,"abstract":"We present IR emission images obtained from semiconductor devices using compressive sensing mathematics combined with a single-element infrared photon detector as method of defect detection. High signal to noise ratio, robust measurements and fast acquisition have make compressive imaging a strong supplement to traditional IR analysis systems.","PeriodicalId":6353,"journal":{"name":"2011 International Conference on Infrared, Millimeter, and Terahertz Waves","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2011-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 International Conference on Infrared, Millimeter, and Terahertz Waves","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRMMW-THZ.2011.6105248","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We present IR emission images obtained from semiconductor devices using compressive sensing mathematics combined with a single-element infrared photon detector as method of defect detection. High signal to noise ratio, robust measurements and fast acquisition have make compressive imaging a strong supplement to traditional IR analysis systems.
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