{"title":"Scanning tunneling lithography of\nsilicon nanoparticle films","authors":"P. Scheier, K. Sattler","doi":"10.1140/EPJD/E2003-00173-X","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":22391,"journal":{"name":"The European Physical Journal D - Atomic, Molecular, Optical and Plasma Physics","volume":"14 1","pages":"347-349"},"PeriodicalIF":0.0000,"publicationDate":"2003-07-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"The European Physical Journal D - Atomic, Molecular, Optical and Plasma Physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1140/EPJD/E2003-00173-X","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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