Generation of UV laser light via intra-cavity frequency doubling of an AlGaInP-VECSEL

T. Schwarzback, H. Kahle, M. Eichfelder, W. Schulz, R. Rossbach, M. Jetter, P. Michler
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Abstract

In recent years, vertical external cavity surface-emitting lasers (VECSELs) became an important category of power-scalable semiconductor lasers in a wide range of applications. Examples can be found in many fields of work as biophotonics, television or projectors, spectroscopy or lithography. Using external cavities and optical excitation, VECSELs exhibit high continuous-wave (cw) output power and near-diffraction-limited beam quality with a TEM00 Gaussian beam profile [1]. With an external cavity, the possibility of utilizing intra-cavity optical elements arise. Here, filters and frequency conversion crystals could be used intra-cavity to expand the spectral range of the laser by wavelength tuning or harmonic generation of coherent laser light.
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通过AlGaInP-VECSEL的腔内倍频产生紫外激光
近年来,垂直外腔面发射激光器(VECSELs)成为功率可扩展半导体激光器的一个重要类别,具有广泛的应用前景。在生物光子学、电视或投影仪、光谱学或光刻等许多领域都可以找到这样的例子。使用外腔和光激发,VECSELs具有高连续波输出功率和近衍射限制的光束质量,具有TEM00高斯光束轮廓[1]。有了外腔,就有可能利用腔内光学元件。在这里,滤波器和频率转换晶体可以在腔内通过波长调谐或相干激光的谐波产生来扩大激光的光谱范围。
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