Effect of Electrode Configuration on the Frequency and Quality Factor Repeatability of RF Micromechanical Disk Resonators

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI:10.1109/SENSOR.2007.4300669

Yang Lin, Jing Wang, S. Pietrangelo, Z. Ren, Clark T.-C. Nguyen

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引用次数: 5

Abstract

A statistical evaluation of the standard deviations of the resonance frequencies and quality factors of polysilicon surface-micromachined micromechanical disk resonators with fully-surrounding and split electrode configurations has been conducted by fabricating and measuring a large quantity (>400) of devices. Through this analysis, respective single-wafer resonance frequency standard deviations as low as 642 ppm for fully-surrounding electrode devices; and 984 ppm for two-port split electrode devices; have been measured. Respective average quality factor standard deviations for fully surrounding electrode devices of 5.6% in vacuum; and 3.9% in air; have also been obtained. The standard deviations for both frequency and Q of each resonator type are well within values needed to achieve the -3% percent bandwidth requirements for filters presently used in the RF front-ends of wireless communication devices without trimming.

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电极结构对射频微机械圆盘谐振器频率和质量因数重复性的影响

通过制造和测量大量(>400)器件，对具有全环绕和分裂电极结构的多晶硅表面微机械圆盘谐振器的谐振频率和质量因子的标准差进行了统计评估。通过分析，对于全环绕电极器件，各自的单晶圆谐振频率标准差低至642 ppm;双端口分离电极器件为984 PPM;已经测量过了。真空条件下全环绕电极装置的平均质量因子标准差为5.6%;空气中占3.9%;也得到了。每种谐振器类型的频率和Q的标准偏差都在达到目前用于无线通信设备RF前端的-3%带宽要求所需的值之内，而无需修整。

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TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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