S. Setoodeh, U. Kemiktarak, F. Bayatpur, S. Fouladi, D. Feld
{"title":"A High Power Circuit Model of an FBAR Resonator for Use in Filter Design","authors":"S. Setoodeh, U. Kemiktarak, F. Bayatpur, S. Fouladi, D. Feld","doi":"10.1109/ULTSYM.2019.8925762","DOIUrl":null,"url":null,"abstract":"FBAR resonators comprise a thin film metal-piezoelectric-metal membrane with an air cavity on either side. Under high power operation an FBAR resonator exhibits a radial temperature distribution. A high power electro-thermal model must incorporate this radial temperature distribution so that it can adequately capture a resonator’s electrical behavior including hysteresis. Prior electro-thermal models, which have been used to model the high-power performance of solidly mounted BAW resonators, assume a uniform temperature distribution in the radial direction, and are thus incompatible for use in modeling FBAR resonators.","PeriodicalId":6759,"journal":{"name":"2019 IEEE International Ultrasonics Symposium (IUS)","volume":"43 1","pages":"2169-2173"},"PeriodicalIF":0.0000,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 IEEE International Ultrasonics Symposium (IUS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.2019.8925762","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
FBAR resonators comprise a thin film metal-piezoelectric-metal membrane with an air cavity on either side. Under high power operation an FBAR resonator exhibits a radial temperature distribution. A high power electro-thermal model must incorporate this radial temperature distribution so that it can adequately capture a resonator’s electrical behavior including hysteresis. Prior electro-thermal models, which have been used to model the high-power performance of solidly mounted BAW resonators, assume a uniform temperature distribution in the radial direction, and are thus incompatible for use in modeling FBAR resonators.
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