Collisional moderation by foreign gases in the reaction of SiH3+ with C2H4

R.N. Abernathy , F.W. Lampe
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引用次数: 6

Abstract

Collisional enhancement of the SiC2H7+ intensity in the reaction of SiH3+ ions of 2.6 eV laboratory kinetic energy with C2H4 is due to moderation of the reactant-ion energy rather than removal of excess energy from the (SiC2H7+)* collision complex. The effectiveness of (CD3)4Si, CH4, CO2, N2, D2 and Ar as kinetic energy moderators was studied at a constant C2H4 pressure of 2.5 × 10−4 torr and at moderator pressures up to 5 × 10−3 torr. The most important property determining moderator efficiency is molecular complexity, i.e. number of vibrational degrees of freedom. The moderator (CD3)4Si is not efficient, despite its large number of vibrational degrees of freedom, because it undergoes a rapid reaction with SiH3+ to produce (CD3)3Si+ ions.

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SiH3+与C2H4反应中外来气体的碰撞缓和
在实验室动能为2.6 eV的SiH3+离子与C2H4反应中,SiC2H7+碰撞强度的增强是由于反应离子能量的缓和,而不是由于(SiC2H7+)*碰撞配合物中多余能量的去除。研究了(CD3)4Si、CH4、CO2、N2、D2和Ar在恒定C2H4压力为2.5 × 10−4 torr和高达5 × 10−3 torr的慢化压力下作为动能慢化剂的有效性。决定慢化效率的最重要的性质是分子的复杂性,即振动自由度的数目。慢化剂(CD3)4Si的效率不高,尽管它的振动自由度很大,因为它与SiH3+发生快速反应,产生(CD3)3Si+离子。
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Editorial Subject index Author index High resolution accurate mass measurements of FAB-generated ions by use of peak matching and multichannel analyzer techniques. Secondary ion mass spectrometry of low-temperature solids
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