{"title":"Collisional moderation by foreign gases in the reaction of SiH3+ with C2H4","authors":"R.N. Abernathy , F.W. Lampe","doi":"10.1016/0020-7381(83)85022-0","DOIUrl":null,"url":null,"abstract":"<div><p>Collisional enhancement of the SiC<sub>2</sub>H<sub>7</sub><sup>+</sup> intensity in the reaction of SiH<sub>3</sub><sup>+</sup> ions of 2.6 eV laboratory kinetic energy with C<sub>2</sub>H<sub>4</sub> is due to moderation of the reactant-ion energy rather than removal of excess energy from the (SiC<sub>2</sub>H<sub>7</sub><sup>+</sup>)* collision complex. The effectiveness of (CD<sub>3</sub>)<sub>4</sub>Si, CH<sub>4</sub>, CO<sub>2</sub>, N<sub>2</sub>, D<sub>2</sub> and Ar as kinetic energy moderators was studied at a constant C<sub>2</sub>H<sub>4</sub> pressure of 2.5 × 10<sup>−4</sup> torr and at moderator pressures up to 5 × 10<sup>−3</sup> torr. The most important property determining moderator efficiency is molecular complexity, i.e. number of vibrational degrees of freedom. The moderator (CD<sub>3</sub>)<sub>4</sub>Si is not efficient, despite its large number of vibrational degrees of freedom, because it undergoes a rapid reaction with SiH<sub>3</sub><sup>+</sup> to produce (CD<sub>3</sub>)<sub>3</sub>Si<sup>+</sup> ions.</p></div>","PeriodicalId":13998,"journal":{"name":"International Journal of Mass Spectrometry and Ion Physics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1983-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0020-7381(83)85022-0","citationCount":"6","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Mass Spectrometry and Ion Physics","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0020738183850220","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6
Abstract
Collisional enhancement of the SiC2H7+ intensity in the reaction of SiH3+ ions of 2.6 eV laboratory kinetic energy with C2H4 is due to moderation of the reactant-ion energy rather than removal of excess energy from the (SiC2H7+)* collision complex. The effectiveness of (CD3)4Si, CH4, CO2, N2, D2 and Ar as kinetic energy moderators was studied at a constant C2H4 pressure of 2.5 × 10−4 torr and at moderator pressures up to 5 × 10−3 torr. The most important property determining moderator efficiency is molecular complexity, i.e. number of vibrational degrees of freedom. The moderator (CD3)4Si is not efficient, despite its large number of vibrational degrees of freedom, because it undergoes a rapid reaction with SiH3+ to produce (CD3)3Si+ ions.