Optical Emission Spectroscopic Analysis of Plasma Plume during Pulsed Laser Deposition of PZT

S. Kumar, R. Reshmi, N. Joshy, A. Saritha, M. Jayaraj
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引用次数: 4

Abstract

Spatial variation in intensity of spectral emission, electron temperature, number density, and the time of flight (TOF) of ions and neutrals at various oxygen ambiances has been investigated on ferroelectric lead zirconium titanate (PZT) plasma using optical emission spectroscopy. Plasma produced by ablating PZT ceramic target using Nd-YAG laser operating at the third harmonics ( nm,  ns, repetition frequency 10 Hz) was investigated at various oxygen partial pressures and at various distances from the target surface. Here energy density for laser fluence was fixed as 3.13 Jcm−2 and distance from the target and ambient gas pressure were varied. The electron number density and electron temperature of the PZT plasma at the early stage of plume expansion were measured as  Jcm−2 and 13200 K, respectively, and thus verified the existence of local thermodynamic equilibrium (LTE). Time of flight spectra (TOF) of neutral and singly ionized species in plasma were recorded. The result shows that plasma parameters and velocity of species are of same order for various oxygen partial pressures but have a decreasing tendency with distance. The energy of almost all species in the plume become more or less same at 0.1 mbar. These conditions favour the growth of perovskite PZT thin films.
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脉冲激光沉积PZT等离子体羽流的发射光谱分析
利用光学发射光谱研究了钛酸铅锆(PZT)等离子体在不同氧环境下离子和中性离子的光谱发射强度、电子温度、数密度和飞行时间(TOF)的空间变化。研究了三次谐波(nm, ns,重复频率10 Hz) Nd-YAG激光在不同氧分压和距离靶表面不同距离下烧蚀PZT陶瓷靶产生的等离子体。在这里,激光能量密度固定为3.13 Jcm−2,并改变与目标的距离和环境气体压力。在羽流膨胀初期,PZT等离子体的电子数密度和电子温度分别为Jcm−2和13200 K,从而验证了局域热力学平衡(LTE)的存在。记录了等离子体中中性和单电离物质的飞行时间光谱(TOF)。结果表明:在不同的氧分压下,等离子体参数和粒子速度都是同数量级的,但随着距离的增加有减小的趋势。在0.1毫巴时,羽流中几乎所有物质的能量都差不多了。这些条件有利于钙钛矿PZT薄膜的生长。
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