B. Hazarika, N. Afzulpurkar, C. Punyasai, D. Kumar Das
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引用次数: 2
Abstract
The principle of electron force microscopy is a well-known phenomenon of sensing in high sensitive MEMS based accelerometers & AFM. We intend to extend this concept towards development of a gyroscope, based on the fact that gyroscope sensors are accelerometers, but with a drive mode. In this paper we present a design of a MEMS based tunneling gyroscope with electron tunneling a sense mechanism. The important parameters required for modeling of the single axis gyroscope is like spring constant, damping coefficient and resonance frequencies are calculated using FEA analysis using COVENTORWARE. A SIMULINK based model is used to examine the response behavior of the model.
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