G. Beshkov, D. Dimitrov, S. Georgiev, T. Dimitrova
{"title":"Deposition and Properties of Thin PECVD Carbon Films After Rapid Thermal Annealing","authors":"G. Beshkov, D. Dimitrov, S. Georgiev, T. Dimitrova","doi":"10.1051/JPHYSCOL:1995573","DOIUrl":null,"url":null,"abstract":"In this work the properties of PECVD-carbon films before and after Rapid Thermal Annealing (RTA) are presented. The thickness of the investigated films is in the range 50 - 6000A. The layers are annealed at 1400°C for different times of 1s to 3 min in vacuum 5 x 10 -5 Torr. Raman investigation has been performed before and after annealing.","PeriodicalId":17944,"journal":{"name":"Le Journal De Physique Colloques","volume":"17 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"1995-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Le Journal De Physique Colloques","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1051/JPHYSCOL:1995573","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this work the properties of PECVD-carbon films before and after Rapid Thermal Annealing (RTA) are presented. The thickness of the investigated films is in the range 50 - 6000A. The layers are annealed at 1400°C for different times of 1s to 3 min in vacuum 5 x 10 -5 Torr. Raman investigation has been performed before and after annealing.
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