Tianyi Wang, Lei Huang, Yi Zhu, Stefano Giorgio, Philip Boccabella, N. Bouet, M. Idir
{"title":"Ion Beam Figuring System for Synchrotron X-Ray Mirrors Achieving Sub-0.2-µrad and Sub-0.5-nm Root Mean Square","authors":"Tianyi Wang, Lei Huang, Yi Zhu, Stefano Giorgio, Philip Boccabella, N. Bouet, M. Idir","doi":"10.1007/s41871-023-00200-x","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":52345,"journal":{"name":"Nanomanufacturing and Metrology","volume":"C-23 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2023-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nanomanufacturing and Metrology","FirstCategoryId":"1089","ListUrlMain":"https://doi.org/10.1007/s41871-023-00200-x","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"Engineering","Score":null,"Total":0}
期刊介绍：
Nanomanufacturing and Metrology is a peer-reviewed, international and interdisciplinary research journal and is the first journal over the world that provides a principal forum for nano-manufacturing and nano-metrology.Nanomanufacturing and Metrology publishes in the forms including original articles, cutting-edge communications, timely review papers, technical reports, and case studies. Special issues devoted to developments in important topics in nano-manufacturing and metrology will be published periodically.Nanomanufacturing and Metrology publishes articles that focus on, but are not limited to, the following areas:• Nano-manufacturing and metrology• Atomic manufacturing and metrology• Micro-manufacturing and metrology• Physics, chemistry, and materials in micro-manufacturing, nano-manufacturing, and atomic manufacturing• Tools and processes for micro-manufacturing, nano-manufacturing and atomic manufacturing
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