A. Laades, C. Heinze, L. Long, D. Karolewski, J. Baldauf, T. Klein, T. Ortlepp
{"title":"P41 - A MEMS micromachined low cost microheater platform for applications in thermal sensors","authors":"A. Laades, C. Heinze, L. Long, D. Karolewski, J. Baldauf, T. Klein, T. Ortlepp","doi":"10.5162/smsi2023/p41","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":22968,"journal":{"name":"The Poster","volume":"60 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"The Poster","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.5162/smsi2023/p41","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}