A. Vodopyanov, A. Sidorov, A. Veselov, V. Kubarev, O. Shevchenko, Y. Gorbachev
{"title":"On the Prospects for the Study of a Point Discharge Sustained by a Terahertz Free Electron Laser Radiation in an Inhomogeneous Gas Flow","authors":"A. Vodopyanov, A. Sidorov, A. Veselov, V. Kubarev, O. Shevchenko, Y. Gorbachev","doi":"10.1109/IRMMW-THz.2019.8874193","DOIUrl":null,"url":null,"abstract":"It is proposed to use high-power radiation from a terahertz free electron laser to create a localized (point-like) discharge in an inhomogeneous gas flow. Plasma parameters that can be achieved in such a system open up prospects for creating an effective point-like source of extreme ultraviolet light for the next-generation projection lithography.","PeriodicalId":6686,"journal":{"name":"2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)","volume":"8 1","pages":"1-2"},"PeriodicalIF":0.0000,"publicationDate":"2019-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRMMW-THz.2019.8874193","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
It is proposed to use high-power radiation from a terahertz free electron laser to create a localized (point-like) discharge in an inhomogeneous gas flow. Plasma parameters that can be achieved in such a system open up prospects for creating an effective point-like source of extreme ultraviolet light for the next-generation projection lithography.
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