Comparison of properties of thin films of CuInSe2 and its alloys produced by evaporation, RF-sputtering and chemical spray pyrolysis

J.J. Loferski, C. Case, M. Kwietniak , P.M. Sarro , L. Castaner , R. Beaulieu
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引用次数: 8

Abstract

This paper summarizes a six-year research program aimed at preparation and characterization of thin films of the chalcopyrite semiconductor CuInSe2 suitable for photovoltaic solar cells and other semiconductors devices. The thin film deposition methods used were evaporation, flash evaporation, RF-sputtering and chemical spray pyrolysis. Problems with producing films of reproducible properties by these methods are discussed. Gaps in our knowledge of the dependence of the opto-electronic properties of CuInSe2 crystals and films on structural defects and other imperfections are pointed out.

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蒸发、射频溅射和化学喷雾热解制备CuInSe2薄膜及其合金的性能比较
本文总结了一项为期六年的研究计划,旨在制备和表征适用于光伏太阳能电池和其他半导体器件的黄铜矿半导体CuInSe2薄膜。薄膜沉积方法有蒸发法、闪蒸法、射频溅射法和化学喷雾热解法。讨论了用这些方法制备可重复性薄膜的问题。指出了我们对CuInSe2晶体和薄膜的光电性质与结构缺陷和其他缺陷的依赖关系的认识上的空白。
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