{"title":"A humidity repellent and acid-proof self-assembling passivation for gas sensors and transducers with open surfaces","authors":"T. Knittel, G. Freitag, W. Widanarto, I. Eisele","doi":"10.1109/SENSOR.2005.1497343","DOIUrl":null,"url":null,"abstract":"Self assembling mono layers are used to fabricate a humidity repellent and acid-proof film for transducer surface passivation. This protection can be used for silicon containing surfaces, like SiO/sub 2/ or Si/sub 3/N/sub 4/, as well as for aluminium. Etching tests with aggressive acids have shown a more than tenfold higher etching time for 110 nm aluminium layers in the case of protected surfaces. The hydrophobic characteristics are used in a gas sensor to prevent the unintentional ionic drift by surface currents. Stable operation of the gas sensors in environmental condition with r.h. up to 95% is possible.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"57 1","pages":"1400-1403 Vol. 2"},"PeriodicalIF":0.0000,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2005.1497343","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Self assembling mono layers are used to fabricate a humidity repellent and acid-proof film for transducer surface passivation. This protection can be used for silicon containing surfaces, like SiO/sub 2/ or Si/sub 3/N/sub 4/, as well as for aluminium. Etching tests with aggressive acids have shown a more than tenfold higher etching time for 110 nm aluminium layers in the case of protected surfaces. The hydrophobic characteristics are used in a gas sensor to prevent the unintentional ionic drift by surface currents. Stable operation of the gas sensors in environmental condition with r.h. up to 95% is possible.
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