K. Karabeshkin, P. Karaseov, A. Struchkov, A. Titov, A. Azarov, D. Gogova
{"title":"Comparative Study of Ion-Induced Damage Formation in GaN and beta-Ga2O3","authors":"K. Karabeshkin, P. Karaseov, A. Struchkov, A. Titov, A. Azarov, D. Gogova","doi":"10.1007/978-3-030-81119-8_26","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":21949,"journal":{"name":"Springer Proceedings in Physics","volume":"3 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Springer Proceedings in Physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/978-3-030-81119-8_26","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}