The New Development of QEPAS Trace Gas Sensor

Yufei Ma
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Abstract

Quartz-enhanced photoacoustic spectroscopy (QEPAS) is a novel technique for trace gas sensing which was invented by Prof. Tittel’s group in 2002 [1]. QEPAS uses a quartz tuning fork (QTF) as acoustic wave transducer. It process merits of high selectivity, high sensitivity and immune to environmental noise [2]. Therefore it was widely used in many fields and different sensor architecture was developed.
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QEPAS微量气体传感器的新发展
石英增强光声光谱(QEPAS)是Tittel教授小组于2002年发明的一种新型痕量气体传感技术[1]。QEPAS使用石英音叉(QTF)作为声波传感器。该工艺具有选择性高、灵敏度高、不受环境噪声影响等优点[2]。因此,它被广泛应用于许多领域,并开发了不同的传感器结构。
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