Structural, Chemical and Optical Properties of Pure and Al-Doped Zno Thin Films Derived by Sol–Gel Dip Coating Process

A. Kadari, A. N. Ech-Chergui, M. Mohamedi, A. Zoukel, Tair Sabrina, Adjdir Mehdi, K. Driss-Khodja, B. Amrani
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Abstract

Abstract Pure and Al-doped ZnO thin films were successfully deposited with sol-gel dip coating on both substrates Si (100) and glass. The structural, chemical, morphological and optical properties as a function of the annealing temperature and dopant atomic concentration were investigated by means of X-ray diffraction, Energy dispersive X-ray, Scanning Electron Microscopy, and spectrophotometry. All the pure and doped films show a polycrystalline nature and hexagonal in structure. Accurate doping was proven by EDX. In addition, the SEM analysis revealed that the films possess uniform distribution throughout the surface and the grain dimension decreases with Al doping. From the transmittance measurements, it is see that all films are over 55% in the visible region and the band gap energy increases from 3.28 to 3.45 eV with the increase of Al concentration.
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溶胶-凝胶浸涂法制备纯和掺铝Zno薄膜的结构、化学和光学性质
摘要:在Si(100)基片和玻璃基片上成功地采用溶胶-凝胶浸渍法制备了纯铝掺杂ZnO薄膜。采用x射线衍射、能量色散x射线、扫描电镜和分光光度法研究了材料的结构、化学、形态和光学性质与退火温度和掺杂原子浓度的关系。纯膜和掺杂膜均呈现多晶性质和六边形结构。EDX证实了掺杂的准确性。此外,SEM分析表明,Al掺杂后薄膜在表面分布均匀,晶粒尺寸减小。通过透射率测量可知,所有薄膜都在55%以上的可见光区,带隙能量随Al浓度的增加从3.28 eV增加到3.45 eV。
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