Characterization of Soluble Fluorinated Dielectric Nanomaterials for Printed Thin Film Transistors

RAN Pub Date : 2016-04-01 DOI:10.11159/ICNNFC16.108
K. Kim, Young Tae Kim, Jin‐Kyun Lee, B. Yoo
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Abstract

Extended Abstract Solution deposited printing process have been attracted for low cost, large-area electronic applications such as active-matrix display, electronic paper and flexible microelectronics [1]. Thin film transistor (TFT) is generally composed of electrodes, dielectrics and semiconductor layers. Printable materials for TFT have been mainly studied for electrodes and semiconductors [2], but solution-processable gate dielectric materials are relatively limited so far due to several issues such as chemical resistance and compatibility. Chemical compatibility of dielectric materials should be especially considered for the fabrication of top-gate TFT structure or multi-layered devices. Additionally, high dielectric constant insulating material is crucial to reduce the driving voltage of TFT. These technical issues lead to develop new solution based insulating materials which have both high dielectric constant and immiscibility with ordinary organic layers. In order to solve these technical problems, high dielectric constant inorganic nanoparticles such as barium titanate were synthesized and applied fluorinated ligands to the surfaces of nanoparticles by ligand exchange [3]. These hybrid materials can be dispersed in fluorinated solvent and showed suitable coating properties for the formation of gate insulator thin films. In order to evaluate the electrical properties of fluorinated hybrid dielectric material, metal-insulator-metal diode and TFTs were fabricated using solution-processed semiconductors.
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用于印刷薄膜晶体管的可溶氟化介电纳米材料的表征
溶液沉积印刷工艺因其低成本、大面积的电子应用而受到广泛的关注,如有源矩阵显示、电子纸和柔性微电子[1]等。薄膜晶体管(TFT)一般由电极层、电介质层和半导体层组成。用于TFT的可印刷材料主要用于电极和半导体,但由于耐化学性和相容性等几个问题,迄今为止可溶液加工的栅极介电材料相对有限。在制作顶栅TFT结构或多层器件时,应特别考虑介质材料的化学相容性。此外,高介电常数绝缘材料是降低TFT驱动电压的关键。这些技术问题促使人们开发出具有高介电常数和与普通有机层不混溶性的新型溶液基绝缘材料。为了解决这些技术问题,合成了钛酸钡等高介电常数无机纳米颗粒,并通过配体交换[3]将氟化配体应用于纳米颗粒表面。这些杂化材料可以分散在氟化溶剂中,并表现出适合于栅极绝缘子薄膜形成的涂层性能。为了评价氟化杂化介质材料的电学性能,采用溶液处理半导体制备了金属-绝缘体-金属二极管和tft。
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