Direct bonding: From an optical technology to a broad research topic

Abstract

For more than thirty years Philips Research has been engaged in direct bonding. A survey is given of how what was first the study of an optical technology gradually changed into the development of special applications in semiconductor technology. Cooperation between workshops with mastered dedicated technologies and research groups with incentives is shown to be indispensable for success. The principles and diversity of direct bonding are briefly described, after which an impression is given of its stimulating impact on Philips' research programme.