Design of 600 GHz 3-bit delay-line phase shifter using RF NEMS series switches

Abstract

This paper presents for the first time a study on a 3-bit coplanar waveguide (CPW) NEMS phase shifter simulated and optimized at 600 GHz. Simulation results based on the Ansoft High Frequency Structure Simulator (HFSS) predict a return loss better than 19.5 dB for all bit combinations in the frequency band of 550 GHz to 650 GHz. A maximum phase error less of than 3.91 % is simulated. The dimension of the device is 59.3 µm × 37.8 µm. This is the first smallest 600 GHz RF NEMS phase shifter design up-to-date.