{"title":"Recent progress in the nondestructive analysis of surfaces, thin films, and interfaces by spectroellipsometry","authors":"D.E. Aspnes","doi":"10.1016/0378-5963(85)90212-0","DOIUrl":null,"url":null,"abstract":"<div><p>The advantages of spectroellipsometry include relative instrumentational simplicity, sensitivity to composition, density, and microstructure of thin films, submonolayer sensitivity to adsorbates, overlayers, and interfaces, and the capability of providing this information nondestructively, in real time, and in any transparent ambient. In this paper I discuss present trends and likely future directions for instrumentation, data analysis, and applications, and illustrate present capabilities by various examples.</p></div>","PeriodicalId":100105,"journal":{"name":"Applications of Surface Science","volume":"22 ","pages":"Pages 792-803"},"PeriodicalIF":0.0000,"publicationDate":"1985-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0378-5963(85)90212-0","citationCount":"13","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applications of Surface Science","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0378596385902120","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 13
Abstract
The advantages of spectroellipsometry include relative instrumentational simplicity, sensitivity to composition, density, and microstructure of thin films, submonolayer sensitivity to adsorbates, overlayers, and interfaces, and the capability of providing this information nondestructively, in real time, and in any transparent ambient. In this paper I discuss present trends and likely future directions for instrumentation, data analysis, and applications, and illustrate present capabilities by various examples.
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