Advances in Deposition of Main-Group Metal Oxides and Rare-Earth Oxides from Metal Enolates

H. Lang, David Adner, C. Georgi
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Abstract

This chapter is an update of a review published by our group elsewhere in Patai's Series; in addition, in this volume, chapters present the recent advances in the deposition of metals and transition-metal oxides, all derived from metal enolates. Materials featuring group 3 - 12 elements have attracted great technological and scientific attention during the last decades because of their outstanding chemical and physical properties. They are widely used in industry, including a variety of catalyst supports, coatings, as dielectrics for semiconducting devices, and as sensors. Keywords: metal enolates; transition-metal oxides; β-diketonates; β-enaminones; β-diketiminates; macrocycles; deposition; gas phase; wet chemistry; group 3 - 12 elements
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金属烯醇化物沉积主族金属氧化物和稀土氧化物的研究进展
本章是我们小组在Patai系列的其他地方发表的一篇综述的更新;此外,在本卷中,章节介绍了金属和过渡金属氧化物沉积的最新进展,所有这些都来自金属烯醇化物。在过去的几十年里,以3 - 12族元素为特征的材料由于其优异的化学和物理性能而引起了技术和科学的极大关注。它们广泛应用于工业,包括各种催化剂支撑,涂层,半导体器件的电介质和传感器。关键词:金属烯醇化物;过渡金属氧化物;β-diketonates;β及其;β-diketiminates;重点;沉积;气相;湿法化学;第3组- 12个元素
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