Plasma-Enhanced CVD of Organosilicate Glass (OSG) Films Deposited from Octamethyltrisiloxane, Bis(trimethylsiloxy)methylsilane, and 1,1,3,3-Tetramethyldisiloxane
{"title":"Plasma-Enhanced CVD of Organosilicate Glass (OSG) Films Deposited from Octamethyltrisiloxane, Bis(trimethylsiloxy)methylsilane, and 1,1,3,3-Tetramethyldisiloxane","authors":"Qingguo Wu, K. Gleason","doi":"10.1023/A:1022813808367","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":20249,"journal":{"name":"Plasmas and Polymers","volume":"7 1","pages":"31-41"},"PeriodicalIF":0.0000,"publicationDate":"2003-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"24","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Plasmas and Polymers","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1023/A:1022813808367","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
