Study of the Properties of the Porous Silicon Synthesized by Ag Assisted Chemical Etching

Madhavi Karanam, G. M. Rao, S. Habibuddin, R. Padmasuvarna
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引用次数: 3

Abstract

Porous Silicon (PSi) is synthesized by Ag assisted electroless etching and characterized by Scanning electron microscopy (SEM). The effect of etching time on the optical reflectivity, optical absorbance of PSi is investigated. Reflectivity measurements showed that 45% reflectivity Si wafers drops from 45% to 10% for 2 hours etching and 6% for 3 hours etching. The decrease in the reflectivity shows that the PSi can be employed as an anti reflecting substrate in optoelectronic devices. The absorbance measurements reveal that the average absorbance of PSi is 0.60 in the wavelength range 300-800 nm after 2 hours etching. From the photoluminescence spectra it was found that PL intensity of PSi is high compared to bare silicon wafer. Static water contact angle measurements were performed to examine the hydrophobic properties of the PSi prepared under different conditions.
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银辅助化学蚀刻合成多孔硅的性能研究
采用银辅助化学刻蚀法合成了多孔硅(PSi),并用扫描电镜对其进行了表征。研究了刻蚀时间对PSi的光学反射率和吸光度的影响。反射率测量表明,45%的硅晶片在蚀刻2小时后反射率从45%下降到10%,在蚀刻3小时后则下降到6%。反射率的降低表明PSi可以用作光电器件中的抗反射衬底。吸光度测量结果表明,经过2小时的刻蚀,PSi在300 ~ 800 nm波长范围内的平均吸光度为0.60。从光致发光光谱中发现,PSi的光致发光强度比裸硅片高。通过静水接触角测试,考察了不同条件下制备的PSi的疏水性。
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