{"title":"A micromachined gyroscope with piezoresistance for both high performance Coriolis-effect detection and torsional vibration monitoring","authors":"Xuemeng Chen, Xinxin Li, Zhaohui Song, Shusen Huang, Yuelin Wang, J. Jiao, Heng Yang, Ying Zhang","doi":"10.1109/SENSOR.2005.1496373","DOIUrl":null,"url":null,"abstract":"A micromachined vibrating gyroscope with a novel piezoresistive scheme is designed, fabricated and tested. A piezoresistive sensing method for Coriolis-acceleration detection is used with both high sensitivity and high resonant frequency. A four-terminal piezoresistive element is used to monitor and stabilize the vibration amplitude of the driving mode through a feedback loop. With the same loop, temperature drift of the gyro's piezoresistive output can be on-chip compensated effectively. The gyro performance is measured, with the following results: resonance frequency in detection mode is 989 Hz; angular rate measurement range is /spl plusmn/ 300/spl deg//s; noise-limited angular rate resolution is 0.33/spl deg//s.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"63 1","pages":"117-120 Vol. 1"},"PeriodicalIF":0.0000,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2005.1496373","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
A micromachined vibrating gyroscope with a novel piezoresistive scheme is designed, fabricated and tested. A piezoresistive sensing method for Coriolis-acceleration detection is used with both high sensitivity and high resonant frequency. A four-terminal piezoresistive element is used to monitor and stabilize the vibration amplitude of the driving mode through a feedback loop. With the same loop, temperature drift of the gyro's piezoresistive output can be on-chip compensated effectively. The gyro performance is measured, with the following results: resonance frequency in detection mode is 989 Hz; angular rate measurement range is /spl plusmn/ 300/spl deg//s; noise-limited angular rate resolution is 0.33/spl deg//s.
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