Physical Investigations on Ti:ZnO Thin Films by Sol-Gel Spin Coating to Detect Acetone

K. Srinivasarao, A. Ashok Kumar, B. Tirumalarao
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Abstract

The ZnO and Ti:ZnO thin films were deposited on ordinary glass, quartz glass, substrates by sol‐gel spin coating. The atomic percent (at.%) of Titanium (Ti) in ZnO is varied from 1 to 6. The deposited thin films were characterized by Grazing Incidence X‐ray diffraction (GIXRD) for structural determination, High ‐ resolution Scanning Electron Microscopy (HRSEM) to determine microstructure, optical transmittance to know the type of optical transition in the films. The structure of the ZnO and Ti:ZnO films was determined by Grazing Incidence X‐ray diffraction (GIXRD). The ZnO films were observed to be crystallizes in Hexagonal wurtzite structure with (002) orientation, where as Ti:ZnO films were amorphous. The intensity of (002) decrease with increasing Ti at.%. The grain size is 20 nm and is decreasing to 10 nm with increasing Ti at.%. The HRSEM images of Ti (1%):ZnO and Ti (6%):ZnO thin films reveals that the films contain nanoflakes of uniform size. These flakes contain spherical nanoparticles of uniform size. The samples were tested for their sensitivity for 300 and 600 ppm of acetone and is maximum for films contain 1 at. % of Titanium.
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溶胶-凝胶自旋涂覆Ti:ZnO薄膜检测丙酮的物理研究
采用溶胶凝胶自旋镀膜的方法在普通玻璃、石英玻璃、衬底上制备了ZnO和Ti:ZnO薄膜。钛(Ti)在ZnO中的原子百分率(at.%)在1 ~ 6之间变化。采用掠入射X射线衍射仪(GIXRD)测定薄膜的结构,高分辨率扫描电镜(HRSEM)测定薄膜的微观结构,光学透射率测定薄膜的光学跃迁类型。采用掠入射X射线衍射(GIXRD)测定了ZnO和Ti:ZnO薄膜的结构。ZnO薄膜呈(002)取向的六方纤锌矿结构结晶,而Ti:ZnO薄膜呈无定形。(002)的强度随Ti的增加而降低。晶粒尺寸为20 nm,随着Ti含量的增加,晶粒尺寸逐渐减小至10 nm。Ti (1%):ZnO和Ti (6%):ZnO薄膜的HRSEM图像表明,薄膜中含有均匀尺寸的纳米片。这些薄片含有均匀大小的球形纳米颗粒。测试了样品对300和600 ppm丙酮的灵敏度,以及对含有1 at的薄膜的最大灵敏度。%的钛。
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来源期刊
CiteScore
1.20
自引率
0.00%
发文量
3
期刊介绍: IJCMSSE is a refereed international journal that aims to provide a blend of theoretical and applied study of computational materials science and surface engineering. The scope of IJCMSSE original scientific papers that describe computer methods of modelling, simulation, and prediction for designing materials and structures at all length scales. The Editors-in-Chief of IJCMSSE encourage the submission of fundamental and interdisciplinary contributions on materials science and engineering, surface engineering and computational methods of modelling, simulation, and prediction. Papers published in IJCMSSE involve the solution of current problems, in which it is necessary to apply computational materials science and surface engineering methods for solving relevant engineering problems.
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